Semiconductor Applications

Processes used to manufacture semiconductors require precise quality control and the use of hazardous, highly corrosive chemicals. One key element of being able to make in-situ, real-time measurements of chemical component concentrations is the monitoring point. Guided Wave designs and manufactures sample interfaces in a variety of materials and configurations that withstand these harsh conditions. Coupled with a Guided Wave analyzer platform via fiber optic cables, this optically-matched and optimized analyzer system:

  • Provides continuous, accurate, and precise real-time, in-situ information to monitor and help control bath concentrations
  • Helps the manufacturer increase the efficiency of the production process through real-time information
  • Reduces, or eliminates, the need to remove and dispose of chemical samples
  • Improves operator safety by reducing exposure to hazardous chemicals by taking such periodic samples
  • Preserves the integrity of the process chemical composition by employing non-metallic and chemically inert sample interfaces at the monitoring point
  • Reduces overall process sample-point cost through the use of Guided Wave multi-channel analyzers

Semiconductor Application examples:

  • Copper and Sulfuric Acid
  • HCl (Hydrochloric Acid)
  • HF (Hydrofluoric Acid)
  • H3PO4(Phosphoric Acid)
  • “Standard Cleaners”, Cleaning Solutions, SC-1, SC-2
  • TMAH (Tetramethylammonium Hydroxide) in Water
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